Influence of DLC films on higher harmonic frequencies in capacitive discharges

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Authors

DVOŘÁK Pavel BURŠÍKOVÁ Vilma ŽEMLIČKA Radek HOMOLA Vojtěch

Year of publication 2011
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Influence of creation or destruction of a DLC film on Fourier components of discharge voltage including higher harmonic frequencies is studied. Fourier components react sensitively on the film presence which can be explained as an influence of the coefficient of secondary electron emission on the electron concentration.
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