Hybrid PVD-PECVD Process for Synthesis of Me/C Nanocomposite Coatings

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Publikace nespadá pod Pedagogickou fakultu, ale pod Přírodovědeckou fakultu. Oficiální stránka publikace je na webu muni.cz.
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VAŠINA Petr SCHMIDTOVÁ Tereza SOUČEK Pavel

Rok publikování 2012
Druh Konferenční abstrakty
Fakulta / Pracoviště MU

Přírodovědecká fakulta

Citace
Popis Hybrid PVD-PECVD process of titanium sputtering in argon and acetylene has been used for deposition of nanocomposite material consisting of nanocrystallites of titanium carbide embedded in hydrogenated carbon matrix. nc-TiC/a-C:H layers showed promising combination of properties such as high hardness and Young’s modulus with low friction and wear making it an industrially attractive material for protective coatings and tribological applications. Hybrid PVD-PECVD process that combines aspects of both conventional techniques: sputtering of titanium target (PVD) and acetylene as a source of carbon for polymerization (PECVD) was studied. The aim of this contribution is to describe and understand elementary processes influencing the hybrid PVD-PECVD process. We report a non-monotonous evolution of cathode voltage and current, total pressure and spectral line intensities on acetylene supply flow. We propose an explanation of non-monotonous evolutions through the analysis of the target state. We correlate process characteristics and coating properties.
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