Ellipsometric parameters and reflectances of thin films with slightly rough boundaries
| Autoři | |
|---|---|
| Rok publikování | 1998 |
| Druh | Článek v odborném periodiku |
| Časopis / Zdroj | Journal of modern optics |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | http://hydra.physics.muni.cz/~franta/bib/JMO45_903.html |
| Obor | Optika, masery a lasery |
| Popis | In this theoretical paper formulae for important optical quantities of single layers with slightly randomly rough boundaries are derived by means of a generalized Rayleigh-Rice theory. Thus the formulae for the specular reflectances, ellipsometric parameters and flux of scattered energy of the layers mentioned are presented. The theoretical results are illustrated by a numerical analysis. Practical features implied by this analysis to be relevant from the experimental point of view are introduced as well. |
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