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Project information
Design and construction of the equipment for in-situ measurement of thin film surface homogeneity

Information

This project doesn't include Faculty of Education. It includes Faculty of Science. Official project website can be found on muni.cz.
Investor logo
Project Identification
GA101/98/0772
Project Period
1/1998 - 1/2000
Investor / Pogramme / Project type
Czech Science Foundation
  • Standard Projects
MU Faculty or unit
Faculty of Science
Cooperating Organization
Brno University of Technology
  • Responsible person prof. RNDr. Jiří Spousta, Ph.D.

The project proposal is aimed at a design and construction of the compact equipment for in-situ measurement of thin film surface homogeneity. This equipment consists of a stable source of white light, CCD camera and dual spectrophotometer. The function o f the instrument (based on an original method of the detection of the white light scattered from the growing thin film in a CCD camera) will be verified via its installation onto a vacuum deposition chamber containing two Kaufman's broad ion beam sources - (IBAD). The results will be utilized in the deposition process control and thus we should be able to prepare the multilayer structures with a defined optical properties. The advantage of the apparatus is its wide applicability for in-situ control of t hin films deposited by other technologies. In the project students of the Master and PhD degree cource will be involved.

Publications

Total number of publications: 4

2001

2000

1998

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