Diffuse coplanar surface barrier discharge for cleaning and activation of glass substrate

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Authors

ŠTĚPÁNOVÁ Vlasta SKÁCELOVÁ Dana SLAVÍČEK Pavel ČERNÁK Mirko

Year of publication 2012
Type Article in Periodical
Magazine / Source Chem. listy
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords barrier discharge; DCSBD; plasma cleaning
Description Diffuse coplanar surface barrier discharge - DCSBD was used for cleaning and activation of borosilicate glass substrates. Results was studed by AFM.
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