Modelling of electric characteristics of capacitively coupled discharges including nonlinear effects of sheaths
| Authors | |
|---|---|
| Year of publication | 2013 |
| Type | Article in Periodical |
| Magazine / Source | Plasma Sources Sci. Technol. |
| MU Faculty or unit | |
| Citation | |
| Doi | http://dx.doi.org/10.1088/0963-0252/22/4/045016 |
| Field | Plasma physics |
| Keywords | plasma; capacitively coupled discharges; higher harmonic frequencies; sheaths; electric characteristics |
| Description | Electric characteristics of capacitively coupled discharges were calculated, including their nonlinear behaviour and generation of higher harmonic frequencies of discharge current and voltage. The discharge was modelled as a series combination of the bulk plasma, two nonlinear sheaths and a radio frequency generator. Comparison of the results of the model with an experiment is discussed. The model was used for studying the waveforms of discharge current and sheath voltages and generation of higher harmonic frequencies at a wide range of discharge parameters. Coupling of higher harmonic frequencies, discharge asymmetry and discharge voltage was demonstrated. The effects of plasma–sheath resonance and other phenomena on the discharge behaviour were shown. |
| Related projects: |