3D Heteroepitaxy of Mismatched Semiconductors on Silicon
Authors | |
---|---|
Year of publication | 2014 |
Type | Article in Periodical |
Magazine / Source | Thin Solid Films |
MU Faculty or unit | |
Citation | |
web | http://www.sciencedirect.com/science/article/pii/S0040609013017057 |
Doi | http://dx.doi.org/10.1016/j.tsf.2013.10.094 |
Field | Solid matter physics and magnetism |
Keywords | Monolithic integration; Epitaxial growth; Ge; GaAs; Patterned Si substrates; Scanning X-ray nano-diffraction; Room-temperature photoluminescence; X-ray detectors |
Description | We present a method for monolithically integrating mismatched semiconductor materials with Si, coined three-dimensional (3D) heteroepitaxy. The method comprises the replacement of conventional, continuous epilayers by dense arrays of strain- and defect-free, micron-sized crystals. |
Related projects: |