Investigation of ionized density fraction in reactive HiPIMS

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Authors

BERNÁTOVÁ Katarína KLEIN Peter HNILICA Jaroslav VAŠINA Petr

Year of publication 2021
Type Appeared in Conference without Proceedings
MU Faculty or unit

Faculty of Science

Citation
Description The presentation described and explained behaviour of the temporal evolution of sputtered particles densities and their ionized density fraction near the target and the substrate during the HiPIMS process. Four main regimes of the hysteresis in the argon-nitrogen atmosphere including two in the metallic regime, the transition regime and the compound regime were compared.
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