Investigation of ionized density fraction in reactive HiPIMS
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| Year of publication | 2021 |
| Type | Appeared in Conference without Proceedings |
| MU Faculty or unit | |
| Citation | |
| Description | The presentation described and explained behaviour of the temporal evolution of sputtered particles densities and their ionized density fraction near the target and the substrate during the HiPIMS process. Four main regimes of the hysteresis in the argon-nitrogen atmosphere including two in the metallic regime, the transition regime and the compound regime were compared. |
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