Synthesis and characterization of the ceramic refractory metal high entropy nitride and carbide thin films from Cr-Hf-Mo-Ta-W system

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Authors

SOUČEK Pavel STASIAK Tomasz DEBNÁROVÁ Stanislava BURŠÍKOVÁ Vilma KOUTNÁ Nikola LIN Shuyao CZIGÁNY Zsolt BALÁZSI Katalin VAŠINA Petr

Year of publication 2023
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description In this contribution, we focus on high entropy alloy, nitride and carbide coatings from the Cr-Hf-Mo-Ta-W system. The study aims to investigate the effects of deposition temperature and reactive gas flow on the microstructure, crystalline structure and mechanical properties of coatings deposited by reactive magnetron sputtering and hybrid PVD-PECVD magnetron sputtering from elemental segmented targets. The depositions are carried out at ambient temperatures and at 750°C. In particular, we will discuss the bcc-amorphous-fcc structure transition as the function of the nitrogen/carbon content, the differences between the reactive magnetron sputtering and hybrid PVD/PECVD sputtering on the deposition rate, the (absence) of the nitrogen/carbon content saturation and its effects on the micro- and nanostructure of the coatings and on the effect of the structure on the mechanical properties. Experimental findings are corroborated by ab initio density functional theory calculations. Finally, we will talk about the possibilities of future industrial applications.
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