Synthesis and characterization of ceramic high entropy carbide thin films from the Cr-Hf-Mo-Ta-W refractory metal system

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Authors

STASIAK Tomasz DEBNÁROVÁ Stanislava LIN Shuyao KOUTNÁ Nikola CZIGÁNY Zsolt BALÁZSI Katalin BURŠÍKOVÁ Vilma VAŠINA Petr SOUČEK Pavel

Year of publication 2024
Type Article in Periodical
Magazine / Source Surface and Coatings Technology
MU Faculty or unit

Faculty of Science

Citation
Web https://www.sciencedirect.com/science/article/pii/S0257897224004705
Doi http://dx.doi.org/10.1016/j.surfcoat.2024.130839
Keywords High entropy carbide; High entropy alloy; Multicomponent ceramics; Multicomponent material; Thin film; Magnetron sputtering
Description We use reactive DC magnetron sputtering to showcase synthesis strategies for multicomponent carbides with the NaCl-type fcc structure and illustrate how deposition conditions allow controlling the formation of metallic and ceramic single phases in the Cr-Hf-Mo-Ta-W system. The synthesis is performed in argon flow and different acetylene flows from 0 to 12 sccm, at ambient and elevated temperatures (700 °C), respectively, hindering/promoting the adatom diffusion. Structural and microstructural investigations reveal the formation of the bcc metallic phase (a = 3.188-3.209 A) in films deposited without acetylene flow, also supported by ab initio density function theory (DFT) analysis of lattice parameters as a function of the C content. Experimentally, a bcc-to-fcc phase transition is observed through the formation of an amorphous coating. Contrarily, samples deposited in higher acetylene flow show an fcc multielement carbide phase (a = 4.33-4.49 A). The crystalline films reveal columnar morphology, while the amorphous ones are very dense. We report promising mechanical properties, with hardness up to 25 ± 1 GPa. The indentation moduli reach up to 319 ± 6 GPa and show trends consistent with DFT predictions. Our study paves the path towards the preparation of Cr-Hf-Mo-Ta-W multicomponent carbides by magnetron sputtering, showing promising microstructure as well as mechanical properties.
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