Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films

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Authors

ELIÁŠ Marek KUDRLE Vít BURŠÍKOVÁ Vilma JANČA Jan

Year of publication 2000
Type Article in Proceedings
Conference Proceedings of 20th Summer School and International Symposium on the Physics of Ionized Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Description Optical diagnostics of inductively coupled RF discharge during deposition of nanocomposite CNx/SiOy films
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