Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition

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Authors

BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka NAVRÁTIL Vladislav PRYČKOVÁ Jana SUBEDI Deepak Prasad JANČA Jan

Year of publication 2001
Type Article in Proceedings
Conference Proceedings of 13th Symposium on Application of Plasma Processes
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Plasma Physics; Thin Solid Films
Description The modification of some properties of diamond-like carbon thin films by addition of hexametyldisiloxan was studied.Especially mechanical properties (microhardness) were studied.
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