Origin of the metastability of phosphorus or boron doped a-Si:H films
Authors | |
---|---|
Year of publication | 2000 |
Type | Article in Proceedings |
Conference | Electronic Devices and Systems Y2K - Proceedings |
MU Faculty or unit | |
Citation | |
Field | Solid matter physics and magnetism |
Keywords | amorphous silicon; doping; metastability |
Description | The effects of light-soaking on either phosphorus- or boron-doped a-Si:H films were studied as functions of the doping level and the temperature. The phosphorus-doped films present a remarkable stability although lightly phosphorus-doped ones show a decrease of their conductivity by five orders of magnitude when light-soaking is performed below 40 C. This effect is attributed to the formation of P-H complexes which are stable at low temperature only. Our results suggest that in both types of doped a-Si:H films the interaction of dopants with hydrogen plays an important role. |
Related projects: |