Optical Characterization of Diamond-like Carbon Films

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Authors	FRANTA Daniel ZAJÍČKOVÁ Lenka OHLÍDAL Ivan JANČA Jan
Year of publication	2001
Type	Article in Periodical
Magazine / Source	Vacuum
MU Faculty or unit	Faculty of Science
Citation
Web	http://hydra.physics.muni.cz/~franta/bib/VAC61_279.html
Field	Solid matter physics and magnetism
Keywords	DLC films; Ellipsometry; Optical properties; Amorphous materials
Description	In this contribution the results achieved by the optical characterization of diamond like carbon (DLC) films are presented. A multi-sample modification of variable angle of incidence spectroscopic ellipsometry (VASE) is used to determine the values of the thicknesses and spectral dependences of the optical constants of these films. It is shown that this optical method is very suitable for characterizing the films studied because the influences of some defects of these films are suppressed within this method. Further the spectral dependences of the optical constants determined for the DLC films studied are interpreted using a new model of dispersion based on the existence of two oscillators corresponding to both the pi-pi* and sigma-sigma* interband transitions. Within this model of dispersion of the optical constants the concept of the band gap is respected as well.
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