Determination of Mechanical Properties of Thin Films by the Indentation Techniques

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Authors

BURŠÍKOVÁ Vilma NAVRÁTIL Vladislav

Year of publication 2001
Type Article in Proceedings
Conference New Trends in Physics
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords thin films; mechanical properties; DSI-test; nanoindentation; AFM
Description In the present paper the indentation techniques as a powerful thin film characterisation tools will be introduced. The objective of our study is to determine the mechanical properties of a number of different coating-substrate systems by means of both micro and nanoindentation techniques.
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