Determination of Mechanical Properties of Thin Films by the Indentation Techniques

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Authors	BURŠÍKOVÁ Vilma NAVRÁTIL Vladislav
Year of publication	2001
Type	Article in Proceedings
Conference	New Trends in Physics
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	thin films; mechanical properties; DSI-test; nanoindentation; AFM
Description	In the present paper the indentation techniques as a powerful thin film characterisation tools will be introduced. The objective of our study is to determine the mechanical properties of a number of different coating-substrate systems by means of both micro and nanoindentation techniques.
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