Advanced methods for deposition of thin films: monitoring, properties, application

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Authors	BRABLEC Antonín BUCHTA Jiří BURŠÍKOVÁ Vilma JAŠEK Ondřej KUDRLE Vít SLAVÍČEK Pavel TRUNEC David ZAJÍČKOVÁ Lenka
Year of publication	2002
Type	Monograph
MU Faculty or unit	Faculty of Informatics
Citation
Description	Advanced methods for deposition of thin films: monitoring, properties, application
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