Enhancement of the Material Surface Properties by Plasma Deposition of Thin Films at Atmospheric Pressure

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Authors	BURŠÍKOVÁ Vilma SŤAHEL Pavel JANČA Jan
Year of publication	2002
Type	Article in Periodical
Magazine / Source	Czech. J. Phys.
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	plasma deposition;surface energy; atmospheric discharge
Description	Enhancement of the Material Surface Properties by Plasma Deposition of Thin Films at Atmospheric Pressure
Related projects:	Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Deposition of thin films and surface modifications in silent and glow discharges at atmospheric pressure Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates