Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion

Authors

SLÁDEK Petr SŤAHEL Pavel

Year of publication 2002
Type Article in Proceedings
Conference Conference Proceedings of Inter-Academia 2002
MU Faculty or unit

Faculty of Education

Citation
Field Plasma physics
Keywords plasma deposition;surface energy; atmospheric discharge
Description Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion
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