Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion

• Authors: SLÁDEK Petr; SŤAHEL Pavel
• Year of publication: 2002
• Type: Article in Proceedings
• Conference: Conference Proceedings of Inter-Academia 2002
• MU Faculty or unit: Faculty of Education
• Field: Plasma physics
• Keywords: plasma deposition;surface energy; atmospheric discharge
• Description: Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion

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