Study of mode transition in low pressure capacitive RF discharges in nitrogen

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Authors

ZAJÍČKOVÁ Lenka DVOŘÁK Pavel KUDRLE Vít ŠMÍD Radek

Year of publication 2002
Type Article in Periodical
Magazine / Source Czech. J. Phys.
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords RF discharge; mode transition; sheath
Attached files
Description We have studied the mode transition in low pressure capacitive RF discharges in nitrogen
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