Plasmachemical nitridation of boron precursors

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Authors

ELIÁŠ Marek KUDRLE Vít JANČA Jan BROŽEK Vlastimil

Year of publication 2002
Type Article in Periodical
Magazine / Source Czech. J. Phys.
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords boron nitride; plasma chemistry
Attached files
Description We carried out the plasmachemical nitridation of boron precursors
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