Deposition of polymer films by rf plasma nozle at atmospheric pressure

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Authors	BURŠÍKOVÁ Vilma SLAVÍČEK Pavel BRABLEC Antonín KAPIČKA Vratislav KLÍMA Miloš
Year of publication	2003
Type	Article in Proceedings
Conference	XV Symposium on Physics of Switching Arc, Vol I, Contributed Papers
MU Faculty or unit	Faculty of Informatics
Citation
Field	Plasma physics
Keywords	plasma deposition
Description	Deposition of polymer films by 13.56 MHz plasma jet at atmospheric pressure.
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