Plasma diagnostics of surface discharge at atmospheric pressure in nitrogen and organosilicon mixture
Authors | |
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Year of publication | 2003 |
Type | Article in Proceedings |
Conference | XV Symposium on Physics of Switching Arc, Vol I, Contributed Papers |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | plasma deposition |
Description | Plasma diagnostics of surface discharge at atmospheric pressure in nitrogen and organosilicon mixture |
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