Study of Mechanical Properties of Nanostructured Multilayer NbN/C-N Coatings Prepared by Reactive Sputtering

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Authors

BURŠÍKOVÁ Vilma SOBOTA Jaroslav BURŠÍK Jiří

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of SAPP XIV
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords mechanical properties; nanostructured multilayer coatings; reactive sputtering
Description A complex analysis of the identation response of thin film - substrate systems measured by depth sensing indentation method was done. The effects of the mechanical properties of the substrate on the effective hardness were studied for several different substrates and the existing theoretial models for substrate influance were tested.
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