Study of Mechanical Properties of Nanostructured Multilayer NbN/C-N Coatings Prepared by Reactive Sputtering

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Authors	BURŠÍKOVÁ Vilma SOBOTA Jaroslav BURŠÍK Jiří
Year of publication	2003
Type	Article in Proceedings
Conference	Proceedings of SAPP XIV
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	mechanical properties; nanostructured multilayer coatings; reactive sputtering
Description	A complex analysis of the identation response of thin film - substrate systems measured by depth sensing indentation method was done. The effects of the mechanical properties of the substrate on the effective hardness were studied for several different substrates and the existing theoretial models for substrate influance were tested.
Related projects:	Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates