Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge

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Authors

NAVRÁTIL Zdeněk ZAJÍČKOVÁ Lenka SŤAHEL Pavel BURŠÍKOVÁ Vilma ČECH Jan KUČEROVÁ Zuzana TRUNEC David

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of 16th ISPC
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords Deposition; thin organosilicon polymer films; atmospheric pressure; glow discharge
Description Deposition of thin organosilicon polymer films in atmospheric pressure glow discharge
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