Hard carbon films: Deposition and diagnostics

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Authors

FRGALA Zdeněk KUDRLE Vít JANČA Jan MEŠKO Marcel ELIÁŠ Marek BURŠÍK Jiří

Year of publication 2003
Type Article in Periodical
Magazine / Source Acta Physica Slovaca
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords Diamond; microwave plasma CVD
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Description We studied the growth of microcrystalline diamond films on pre-treated Si and WC-Co substrates by microwave plasma chemical vapour deposition (MPCVD). The pre-treatment was varied and its effect on diamond film was studied.
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