Raman bands in microwave plasma assisted chemical vapour deposited films

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Authors

KADLEČÍKOVÁ Magdaléna BREZA Juraj VESELÝ Marián FRGALA Zdeněk KUDRLE Vít JANČA Jan JANÍK Ján BURŠÍK Jiří

Year of publication 2003
Type Article in Periodical
Magazine / Source Microelectronics Journal
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords Microwave plasma assisted chemical vapour deposition; Diamond; Raman spectroscopy
Attached files
Description Raman spectroscopy is employed to characterize thin diamond films deposited by microwave plasma assisted chemical vapour deposition technique using a gas mixture of methane and hydrogen. The surface morfology of the films was analyzed by scanning electron microscopy. We have identified submicron crystals on (100) facets of diamond crystals which gave rise to bands in the Raman spectrum centred at 1170 and 1456 cm-1.
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