Diamond Growth on silicon and WC-Co by microwave plasma chemical vapor deposition

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Authors

FRGALA Zdeněk KUDRLE Vít JANČA Jan BURŠÍKOVÁ Vilma VAŠINA Petr MEŠKO Marcel BURŠÍK Jiří KADLEČÍKOVÁ M. KLAPETEK Petr

Year of publication 2003
Type Article in Proceedings
Conference Proceedings of contributed papers WDS'03
MU Faculty or unit

Faculty of Informatics

Citation
Field Plasma physics
Keywords PECVD; diamond; WC; raman spectra; SEM
Description Diamond Growth on silicon and WC=Co by microwave plasma chemical vapor deposition
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