Sheath resistance in RF discharges

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Authors

DVOŘÁK Pavel JANČA Jan

Year of publication 2006
Type Article in Proceedings
Conference Abstracts of Invited Lectures and Contributed Papers of 18th Europhysics Conference on the Atomic and Molecular Physics of Ionised Gases
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords sheath resistance discharge probe
Description The sheath resistance in capacitively coupled discharge was studied. The nonlinearity of the sheath for dc current was proved, i.e. the sheath resistance depended on the dc current flowing through the sheath. It was shown, that the nonlinear behaviour can be used in some cases for the approximate evaluation of the plasma parameters, especially in the sheaths, where the interpretation of the Langmuir probe measurements is not reliable.
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