Study of mechanical properties of graded amorphous carbon coatings prepared using PECVD

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Authors

BURŠÍKOVÁ Vilma STOICA Adrian SOBOTA Jaroslav GROSSMAN Jan FOŘT Tomáš KLAPETEK Petr BURŠÍK Jiří PEŘINA Vratislav BLÁHOVÁ Olga

Year of publication 2008
Type Article in Proceedings
Conference 2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Description For optimisation of performance of the coating there is necessary to optimise the following materials parameters: the elastic modulus, hardness, surface strength, film fracture toughness and film-substrate adhesion. We proposed to protect the substrate surface with graded coating, which has monotonically graded elastic modulus and Poisson's ratio (the variation in elastic modulus is strongly coupled with the variation of Poisson's ratio). The optimal variations (profiles) of elastic constants - in order to supress the indentation induced cracking – will be discussed. The mechanical properties of thin carbon films were studied using several different types of indentation methods: the depth sensing indentation test (DSI) based on analysis of the loading/unloading hysteresis (Fischercope H100 equipped with a Vickers four-sided diamond pyramid), the continuous stiffness measurement (CSM) method (NanoIndenter XP Berkovich three-sided pyramidal tip) and the dynamic mechanical analysis (DMA, UNHT – CSM Instruments). Analysis of the atomic composition was performed and put into the correlation with measured mechanical properties. The dynamic impact wear tester has been used to evaluate the impact resistance of the prepared coatings.
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