Application of spectroscopic imaging reflectometry to analysis of area non-uniformity in diamond-like carbon films

Investor logo

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

OHLÍDAL Miloslav OHLÍDAL Ivan KLAPETEK Petr NEČAS David BURŠÍKOVÁ Vilma

Year of publication 2009
Type Article in Periodical
Magazine / Source Diamond and Related Materials
MU Faculty or unit

Faculty of Science

Citation
Field Optics, masers and lasers
Keywords diamond-like carbon films; optical properties characterization
Description Complete optical characterization of diamond-like carbon (DLC) films non-uniform in thickness is performed using spectroscopic imaging reflectometry (SIR). It is shown that by using this technique it is possible to determine the area distribution (area map) of the local thickness of these films with arbitrary shape of this thickness non-uniformity. Furthermore, it is shown that in principle it is possible to determine the distributions of the refractive index and extinction coefficient of these films simultaneously with the thickness distribution, if a suitable dispersion model of these optical constants is chosen. In this paper the dispersion model of the optical constants of the DLC films based on parameterization of density of electronic states (DOS) is used. The values of the material parameters of this dispersion model are determined too. It is shown that the DLC films studied do not exhibit the area non-uniformity in material parameters and optical constants. The method presented can be used to characterize the non-uniform films consisting of other materials.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.