Laser ablation time-of-flight mass spectrometry (LA-TOF-MS) of silicon doped diamond-like carbon (DLC-Si)
| Authors | |
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| Year of publication | 2009 |
| Type | Article in Proceedings |
| Conference | Frontiers in Low Temperature Plasma Diagnostics 8 |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | Laser ablation; time-of-flight mass spectrometry; silicon doped diamond-like carbon |
| Description | Silicon-doped diamond-like carbon (DLC-Si) was prepared by plasma-enhanced chemical vapor deposition (PECVD) technique from a mixture of hexamethyldisiloxane (HMDSO) and oxygen using dual frequenci capacitive discharge. Time of flight mass spectrometer equipped with nitrogen laser (337 nm) was used to charakterize its structure via laser ablation. Stoichometry of positively or negatively charged species was confirmed via isotopic pattern simulation. DLC-Si material shows typical spectral patterns similar to those diamond-like carbon. In addition, chemical bound of Si-C in this material was proved and many positively or negatively charged O(m)Si(n)C(o)H(p) species were identified in plasma plume. |
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