Diagnostics of reactive magnetron sputtering

Investor logo
Investor logo

Warning

This publication doesn't include Faculty of Education. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

VAŠINA Petr DVOŘÁK Pavel SCHMIDTOVÁ Tereza

Year of publication 2010
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Monitoring of reactive magnetron sputtering by means of measurement of higher harmonic frequencies of discharge voltages.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.