Defect Engineering in Czochralski-grown Silicon Studied by TEM

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Authors

SVOBODA Milan BURŠÍK Jiří MEDUŇA Mojmír CAHA Ondřej KUBĚNA Josef

Year of publication 2010
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description As a part of a complex study of nucleation and growth of oxygen precipitates in Czochralski-grown silicon this work reports our latest results obtained by TEM.
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