Alternative method for flow measurement of clog producing gases and liquids in PVD and PECVD processes

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Authors

ZELINA Peter KUDRLE Vít JAŠEK Ondřej

Year of publication 2011
Type Article in Proceedings
Conference Book of Extended Abstracts POTENTIAL AND APPLICATIONS OF THIN CERAMIC AND METAL COATINGS 2011
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords flow measurement; PECVD; Prandtl-Pitot tube; Iron pentacarbonyl
Description In this work we present a method to measure gas flow where conventional mass flow-meters cannot be used. These are the cases when one operates with highly reactive gases, unstable substances or meets other difficulties. We successfully used Prandtl-Pitot tube for measurement of iron pentacarbonyl flow during the process of plasma synthesis of nanoparticles.
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