Development of reference materials for the investigation of local mechanical properties at the nanoscale

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Authors

CHARVÁTOVÁ CAMPBELL Anna KLAPETEK Petr VALTR Miroslav BURŠÍKOVÁ Vilma

Year of publication 2012
Type Article in Periodical
Magazine / Source Surface and Interface Analysis
MU Faculty or unit

Faculty of Science

Citation
Web http://onlinelibrary.wiley.com/doi/10.1002/sia.4850/pdf
Doi http://dx.doi.org/10.1002/sia.4850
Field Plasma physics
Keywords local mechanical properties; nanoindentation; reference materials
Description In this contribution, we present the results of our effort on preparing and testing thin film–based reference materials prepared using plasma technologies. We describe a deposition procedure that allows us to produce samples with a large range of hardness and modulus values. From these, we choose a very soft but stable sample that is then further tested to verify its suitability as a reference sample. The major issues discussed in this article are the repeatability of the deposition process, time stability, and homogeneity.
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