Project information
Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
- Project Identification
- GA202/07/1669
- Project Period
- 1/2007 - 12/2011
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
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Faculty of Science
- doc. RNDr. Vilma Buršíková, Ph.D.
- Mgr. Oto Brzobohatý, Ph.D.
- doc. Mgr. Pavel Dvořák, Ph.D.
- Mgr. Daniel Franta, Ph.D.
- prof. RNDr. Josef Havel, DrSc.
- prof. RNDr. Jan Janča, DrSc.
- prof. RNDr. Vladislav Navrátil, CSc.
- doc. Mgr. Zdeněk Navrátil, Ph.D.
- prof. RNDr. Ivan Ohlídal, DrSc.
- doc. Mgr. Pavel Sťahel, Ph.D.
- prof. RNDr. David Trunec, CSc.
- doc. Mgr. Lenka Zajíčková, Ph.D.
- Keywords
- PECVD, dual frequency capacitive discharges DF CCP, nanostrukturovaný DLC, termomechanická kapacita
- Cooperating Organization
-
Institute of Nuclear Physics
- Responsible person RNDr. Vratislav Peřina, CSc.
- Responsible person Ing. Jaroslav Sobota, CSc.
- Responsible person Mgr. Petr Klapetek, Ph.D.
The aim of the present project is to develop a new deposition system based on application of dual-frequency capacitive plasma (DFCCP) for preparation of themally stable nanostructured diamod-like carbon (NDLC) films. With combination of high frequency excitation (ensuring plasma stability and its high density) and low frequency excitation (controlling the ion energy) we will achieve controlled growth of NDLC films. The objective of the study is to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven and stepped substrate surfaces and significant lowering of the internal stress in films. Complex diagnostics and computer simulation of the DFCCP are planned in order to understand the processes of the film growth. The NDLC films will be exstensively studied from the point of view of their structure (RBS, ERDA, TOF ERDA, HRTEM, SEM etc.) as well as properties (micro- and nanoindentation, elipsometry, spectrophotometry, etc.). Moreover, the thermal stability of NDLC films will be studied using thermal desorption spectroscopy.
Publications
Total number of publications: 70
2009
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Measurement of plasma potential waveform in capacitive discharge
Year: 2009, type: Conference abstract
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Optimization of Discharge Conditions for Deposition of Protective Coatings on Polymer Substrates
Year: 2009, type: Conference abstract
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Study of the Mechanical Properties of Diamond-like Carbon Coatings on Polymer Substrates
Frontiers in Low Temperature Plasma Diagnostic 8, year: 2009
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Thermal Desorption Spectroscopy Study on Diamond-like Carbon Coatings
Frontiers in Low Temperature Plasma Diagnostic 8, year: 2009
2008
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Applications of Capillary Electrophoresis using gold nanoparticles
Year: 2008, type: Conference abstract
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Comparative Study on Mechanical Properties of DLC Coatings Prepared by Several Different Deposition Techniques
Year: 2008, type: Conference abstract
-
Deposition of Nanostructured Diamond-Like Carbon Films in Dual Frequency Capacitive Discharge
19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases, year: 2008
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Characterization of nanostructured diamond-like carbon coatings deposited in single and dual frequency capacitive discharges
Year: 2008, type: Conference abstract
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CHEMISTRY OF GOLD CLUSTERS IN PLASMA GENERATED WITH MALDI, LASER DESORPTION IONISATION AND LASER ABLATION FROM VARIOUS PRECURSORS
Year: 2008, type: Conference abstract
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Influence of substrate material on plasma in deposition/sputtering reactor: experiment and computer simulation
Journal of physics D: Applied physics, year: 2008, volume: 41, edition: 3, DOI