Improvement of the efficiency of the silicon solar cells by silicon incorporated diamond-like carbon antireflective coatings

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Authors

BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel ZAJÍČKOVÁ Lenka

Year of publication 2002
Type Article in Periodical
Magazine / Source Journal of Non-Crystalline Solids
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords silicon solar cells; antireflective coatings; diamond-like films; PECVD
Description Silicon incorporated diamond-like antireflective coatings were deposited upon the silicon solar cells in order to improve their efficiency. The films were prepared by plasma enhanced chemical vapor deposition (PECVD) technique from the mixture of hexamethyldisiloxane (HMDSO) and methane. The optical and tribological properties of the coatings could be easily changed by the percentage of the HMDSO in the deposition feed.
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