Project information
Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface
- Project Identification
- MSM0021622411
- Project Period
- 1/2005 - 12/2011
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- Research Intents
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
- Other MU Faculty/Unit
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Central European Institute of Technology
- Keywords
- Plasma chemistry, plasma surface treatment, plasma deposition, plasma polymerisation, hard and supra hard coatings,diamond and diamond-like, plasma diagnostics,thin films, spectral plasma sources, low temperature plasma metallurgy, reaction rates of chemi
Study of kinetics of plasmachemical processes by optical, mass-spectrometry and microwave diagnostics. Research and methods of plasmachemical deposition of polymer, superhard, nanocomposite, semipermeable, semisorption and protective thin films. Study of optical, mechanical, chemical and electrical properties of prepared thin films. Study of new types of barrier and surface discharges generated at atmospheric pressure and their applications. New technologies of low-temperature plasma powder metallurgy enabling more economical production of W, WC TiC, WTi and chemical catalysts based on these metals. Proposal and construction of plasmachemical reactors. Study of new methods of plasma diagnostics and monitoring of plasmachemical processes. Computer simulation of discharges and processes running in them. Use of different types of plasma for restoration and conservation of historical artefacts and objects of cultural heritage. Use of pulsed rf and mw plasma for destruction and decomposition of pollutants. Study of selected types of hf and laser generated plasma sources for chemical spectral analysis. Study of perspective volume plasmachemical processes with intention to their practical use. Application of modified hf plasma pencil as a surgery hand operating tool.
This project deals with applied research with large part of basic research. Beside of publications of results new technological patents and industrial samples are expected.
Publications
Total number of publications: 754
2005
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Electrical Properties of Plasma Deposited Thin Films
Year: 2005, edition: Vyd. 1., number of pages: 4 s.
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Electrical Properties of SiOxHyCz Coatings Prepared by PECVD
15th Symposium on Aplications of Plasma Processes, year: 2005
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Ellipsometry in characterization of thin films
Proceedings of the SREN 2005, year: 2005
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Enhancement of mechanical properties of PP-HMDSO/HMDSZ films by means of thermal annealing
Chemické listy, year: 2005, volume: 99, edition: 9
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Evidence of refractive index change in glass substrates induced by high-density reactive ion plating deposition of SiO2 films
Applied Surface Science, year: 2005, volume: 244, edition: 1-4
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Experimental Study and Modelling of the Afterglow of an N2-O2 Microwave Discharge
Proceeding of 27th International Conference on Phenomena in Ionised Gases, year: 2005
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Fotokatalitická aktivita titanových prekurzorů zpracovaných v nízkoteplotním plazmatu
CHISA 2005 , Sborník 52. Konference chemického a procesního inženýrství, year: 2005
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Fotokatalytická aktivita plazmově zpracovaných titanových prekurzorů
Sborník přednášek 14. Konference s mezinárodní účastí APPROCHEM 2005, year: 2005
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Fourier components of plasma potential in hydrogen capacitively coupled rf discharge
Proceedings of XXVII International Conference on Phenomena in Ionized Gases, year: 2005
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Growth of Carbon Nanotubes in Microwave Plasma Torch at Atmospheric Pressure
Proceedings of 17th International Symposium on Plasma Chemisty, year: 2005