Project information
Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
- Project Identification
- OC 527.20
- Project Period
- 1/2000 - 12/2005
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- COST
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
The aim of the project is to study processes running during plasma polymerization, co-polymerization and modification of surfaces of solid state substrates by plasmas. The diagnostics of the reactive plasma will be realized in a special high vacuum reactor by various tools - optical emission spectroscopy, actinometry, mass spectrometry, probes. Protective coatings prepared from various mixtures of monomers and gases like oxygen, argon, methane and deposited on plastic materials as to their optical and mechanical properties. The study (by ESR) of DLC and composite CNx films in inductive coupled plasma will continue. Microcrystalline diamond and DLC films will be also prepared in the microwave reactor ASTEX. Properties of surfaces and deposited films will be investigated by ellipsometry, contact angle, AFM XPS, FTIR. The application of the APG discharge for surface treatment of fibrous material (textile, paper, ...) and new methos of restoration of archaeological artefacts will be studied, too.
Publications
Total number of publications: 92
2001
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Diagnostics and Application of High Frequency Plasma Pencil
Plasma Chemistry and Plasma Processing, year: 2001, volume: 21 (2001), edition: 4
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Diagnostics and monitoring of TiN/AlN deposition process
Year: 2001, type: R&D Presentation
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Diagnostics of Radio Frequency Oxygen Plasma by Optical Emission Spectroscopy
WDS'01 Proceedings of Contributed Papers, year: 2001
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Improvement of the Efficiency of the Silicon P-I-N cells by Silicon Incorporated Diamond-like Carbon Antireflective Coating
19th International Conference on Amorphous and Microcrystalline Semiconductors, year: 2001
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Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Optical diagnostics of inductively coupled RF discharge
SAPP 13th Symposium Proceedings, year: 2001
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Optical characterization of DLC:Si films prepared by PECVD
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Plasma Enhanced CVD of DLC:Si(O) Films from Methane/Hexamethyldisiloxane Feeds
Proceedings of 15th International Symposium on Plasma Chemistry, year: 2001
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Practical exercises in applied plasma chemistry
15th ISPC symposium proceedings, year: 2001
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Preparation of enhanced CN-based hard coatings by PECVD
Proceedings of 15th International Symposium on Plasma Chemistry, year: 2001