Project information
Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
- Project Identification
- OC 527.20
- Project Period
- 1/2000 - 12/2005
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- COST
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
The aim of the project is to study processes running during plasma polymerization, co-polymerization and modification of surfaces of solid state substrates by plasmas. The diagnostics of the reactive plasma will be realized in a special high vacuum reactor by various tools - optical emission spectroscopy, actinometry, mass spectrometry, probes. Protective coatings prepared from various mixtures of monomers and gases like oxygen, argon, methane and deposited on plastic materials as to their optical and mechanical properties. The study (by ESR) of DLC and composite CNx films in inductive coupled plasma will continue. Microcrystalline diamond and DLC films will be also prepared in the microwave reactor ASTEX. Properties of surfaces and deposited films will be investigated by ellipsometry, contact angle, AFM XPS, FTIR. The application of the APG discharge for surface treatment of fibrous material (textile, paper, ...) and new methos of restoration of archaeological artefacts will be studied, too.
Publications
Total number of publications: 92
2002
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Modification of the optical parameters of silicon thin films due to light scattering
Journal of Non-Crystalline Solids, year: 2002, volume: 2002, edition: 299-302, DOI
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Plasmachemical nitridation of boron precursors
Czech. J. Phys., year: 2002, volume: 52, edition: 52
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Structural changes and defects in amorphous hydrogenated SiGe films due to the hydrogen effusion
Conference Proceedings of Inter-Academia 2002, year: 2002
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Study of mode transition in low pressure capacitive RF discharges in nitrogen
Czech. J. Phys., year: 2002, volume: 52, edition: 52
2001
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A Plasma Treatment of Surface of Synthetic Textile Fibers Which Can be Used as Cords in Car Tires.
13th Symposium on Application of Plasma Processes, year: 2001
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Atomic nitrogen concentration in afterglow measured by EPR and NO titration methods
Proceedings of XXVth ICPIG, year: 2001
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Deposition of DLC:Si(O) Films in Low Pressure Discharges
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Deposition of hard carbon films and its diagnostics
Juniormat'01, year: 2001
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Determination of Mechanical Properties of Thin Films by the Indentation Techniques
New Trends in Physics, year: 2001
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Determination of rate constant of N+HMDSZ gas phase chemical reaction by means of EPR
SAPP 13th Symposium Proceedings, year: 2001