Project information
Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate
- Project Identification
- OC 527.20
- Project Period
- 1/2000 - 12/2005
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- COST
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
The aim of the project is to study processes running during plasma polymerization, co-polymerization and modification of surfaces of solid state substrates by plasmas. The diagnostics of the reactive plasma will be realized in a special high vacuum reactor by various tools - optical emission spectroscopy, actinometry, mass spectrometry, probes. Protective coatings prepared from various mixtures of monomers and gases like oxygen, argon, methane and deposited on plastic materials as to their optical and mechanical properties. The study (by ESR) of DLC and composite CNx films in inductive coupled plasma will continue. Microcrystalline diamond and DLC films will be also prepared in the microwave reactor ASTEX. Properties of surfaces and deposited films will be investigated by ellipsometry, contact angle, AFM XPS, FTIR. The application of the APG discharge for surface treatment of fibrous material (textile, paper, ...) and new methos of restoration of archaeological artefacts will be studied, too.
Publications
Total number of publications: 92
2003
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Interferometer Diagnostics of Nitrogen Microwave Pulse Discharge
Proceedings of the XIVth SAPP, year: 2003
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Mechanical Properties of Multilayer Coatings on Polycarbonates Prepared by PECVD
16th International Sympozium on Plasma Chemistry, year: 2003
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Plasmachemical reactors for special synthesis and decompositions
4th European Congress of Chemical Engineering, Granada, Spain,P-6.1-024, year: 2003
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Raman bands in microwave plasma assisted chemical vapour deposited films
Microelectronics Journal, year: 2003, volume: 2003, edition: 34
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Reduction of tungsten precursors in inductive rf discharge plasma reactors
High Temperature Material Processes, year: 2003, volume: 7/2003, edition: 3
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SPECTRAL AND ENERGY DIAGNOSTICS OF ALTERNATING (50 Hz) GLOW DISCHARGES UNDER ATMOSPHERIC PRESSURE
XV Symposium on Physics of Switching Arc, Vol I, Contributed Papers, year: 2003
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Study of high power pulsed microwave discharge
Microwave discharges: fundamentals and applications, year: 2003
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Study of high power pulsed microwave discharge
Microwave discharges: Fundamentals and applications, year: 2003
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Study of influence of discharge parameters on mechanical properties of plasma treated surfaces
XV Symposium on Physics of Switching Arc, Vol I, Contributed Papers, year: 2003
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Study of Mechanical Properties of Nanostructured Multilayer NbN/C-N Coatings Prepared by Reactive Sputtering
Proceedings of SAPP XIV, year: 2003